标签： wafer transfer fork tooling

PEEK-CF30晶圆搬运叉薄叉齿与真空槽配刀

PEEK-CF30 Wafer Fork Tooling for Thin Tines and Vacuum Grooves

针对假设PEEK-CF30晶圆搬运叉的长薄叉齿、浅真空槽、定位孔和嵌件座选择抛光硬质合金刀具，并控制热量与松夹平面度。